AP1000:

The March AP-1000 is designed to meet the rigorous demands of 24-hour operation in high-performance manufacturing environments. The system delivers quality plasma treatment along with unmatched reliability, safety and ease of operation and maintenance.

All the components of the system, including the plasma process chamber, the control electronics, the 13.56 MHz power supply with automatic impedance matching network, and the pumping system are housed within an enclosure constructed of rugged powder coated aluminum.

Optional AP-1000 HTP for enhanced productivity The AP-1000 plasma system with HTP (high throughput) shelves combines the reliability and process quality of the AP- 1000 system with the proven benefits of March’s proprietary shelf design.



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XTRAK Plasma Treatment System:

Unique to the industry, the XTRAK can be configured in the downstream ion-free mode - removing ions, electrons and photons, enabling the chemically active radicals and byproducts to perform the work using oxygen as the source gas. The patentpending XTRAK-IFP system is ideal for cleaning pre-programmed memory devices when UV exposure may be an issue. Multiple plasma modes allow unrestricted choice of any process gas.

SMART TUNE™ MANAGEMENT SYSTEM
 The XTRAK’s SMART Tune management system provides closed-loop plasma control that optimizes the RF system and minimizes tuning time. The system automatically recycles to a plasma-ready state, compensating for changes in vacuum pressure, temperature and varied lot sizes. Maximum power to the chamber is achieved with a proprietary algorithm that constantly measures forward and reflective power inside the chamber.

The system operates in both automatic and manual modes, with a multi-processing feature that allows implementation of single or multiple recipes in one operation. By integrating the XTRAK system with loaders, the XTRAK operates in a standalone configuration. It can also run in an island formfactor to feed a designated line of equipment, including component attach systems, wire bonders and dispense equipment

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